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LT6820
Substage with 20mm travel
The Kleindiek range of stages provides orthogonal positioning
solutions in atmosphere, SEM/FIB, UHV and at low temperatures.
The
LT6820 is designed to enhance the accuracy and functionality
of the standard SEM/FIB microscope stage. It is an economical
and technically superior alternative to laser interferometer
stages. It is designed specifically for lithography,
cell counting and failure analysis applications and
is fitted with positional encoders allowing 100 nm repeatability
on the X and Y axes.
For
more information on the LT6820 Substage, please contact
the nanoTechnology Systems team on+61 3 9432 8932.
www.kleindiek.com
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Gives thanks to nanoTechnology Systems!
