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LT12830
Substage with 30mm travel
The Kleindiek range of stages provides orthogonal positioning
solutions in atmosphere, SEM/FIB, UHV and at low temperatures.
The
LT12830 is designed to be used in SEM/FIB systems to
enhance the accuracy and functionality of the standard
microscope stage. It is an economical and technically
superior alternative to laser interferometer stages.
It is built specifically for lithography, cell counting
and failure analysis applications and contains two positional
encoders per axis for automatic yaw error compensation.
Optional software for three-point alignment is available.
For
more information on LT12830 Substage, please contact
the nanoTechnology Systems team on+61 3 9432 8932.
www.kleindiek.com
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Gives thanks to nanoTechnology Systems!
