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Magellan™
XHR SEM
Introducing
the newest family of scanning electron microscopes from FEI
the Magellan™ XHR SEM. Its extraordinary low voltage
performance provides extreme high resolution, surface specific
information that is simply unavailable from other techniques.
Expanding the applications capabilities of previous SEM, TEM
and FIB systems.
The
Magellan can be used by scientists and engineers, in research
and industrial R&D to see 3D surface images at a range of
angles and at resolutions below one nanometer. Most importantly
the Magellan™ XHR SEM images samples at very low beam
energies, avoiding distortions caused by the beam penetrating
into the material. The Magellan Family extends the range of
nanoscale imaging and analysis, with the speed and ease-of-use
of traditional SEMs.
The
Magellan Family's enhanced performance is achieved though
the integration of new electron optical elements, proprietary
electron gun technology, a highly accurate five-axis piezo-ceramic
stage and high stability platform with fully configurable
analytical chamber. The stage can accommodate large or multiple
smaller samples, while providing fast, accurate navigation
and unequaled stability.
The
Magellan Family comes in two models: The Magellan 400 is optimized
for scientific research while the Magellan 400L is optimized
for semiconductor labs. The semiconductor lab model comes
with a load-lock feature that speeds-up sample throughput,
and includes a retractable solid state backscatter electron
detector (SSBSED) and S2 compliance kit.
For
more information on the Magellan™ XHR SEM please contact
the nanoTechnology Systems team on +61 3 9432 8932.
www.fei.com
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Gives thanks to nanoTechnology Systems!
