Quanta 3D FEG

The Quanta 3D FEG a versatile high-resolution, low vacuum SEM/FIB, for 2D and 3D material characterization and analysis. The Quanta 3D FEG's field-emission electron source delivers clear and sharp electron imaging while increased electron beam current enhances EDS and EBSP analysis.

The Quanta 3D FEG has the option of three imaging modes, high-vacuum, low-vacuum and ESEM™, to accommodate a wide range of samples. In-situ study of the dynamic behavior of materials under varying environmental conditions such as varied temperature and humidity can also be conducted.

Building on FEI's long experience in DualBeam™ technology the Quanta 3D FEG provides you with a powerful, easy to use solution for sample investigation. The Quanta 3D FEG features live SEM imaging while milling, using optimized geometry at the beam coincident point. A large selection of gas chemistries is available to deposit materials or further enhance the FIB milling rate or material selectivity.

Choose the Quanta 3D FEG to expand your laboratory's capabilities, providing faster and more comprehensive materials characterization, analysis and sample preparation.

For more information on the Quanta 3D FEG, please contact the nanoTechnology Systems team on +61 3 9432 8932.

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